Micromachining
نویسندگان
چکیده
منابع مشابه
Bulk Micromachining of Silicon
Bulk silicon etching techniques, used to selectively remove silicon from substrates, have been broadly applied in the fabrication of micromachined sensors, actuators, and structures. Despite the more recent emergence of higher resolution, surfacemicromachining approaches, the majority of currently shipping silicon sensors are made using bulk etching. Particularly in light of newly introduced dr...
متن کاملTool geometry study in micromachining
With the trend towards miniaturization, micromachining becomes more and more important in fabricating micro parts. Investigations have shown that unpredictable tool life and premature tool failure present a serious concern in micromachining. To further develop the process, a systematic study of various types of tool geometry has been carried out. The tool failure modes and the ways in which too...
متن کاملAdhesive Workpiece Fixturing for Micromachining
Even though significant progress has been made in the field of micro production and the development of miniaturized micro production-machines in the last ten years, an explicit consideration of clampingdevices has not taken place. The requirements for clamping technology in the manufacturing of microparts and the manufacturing of macroscale parts are highly different. Special clamping devices f...
متن کاملExcimer laser microfabrication and micromachining
Excimer lasers are proving to be highly successful for fabricating industrial components with feature sizes in the range between 0.05–1,000μm (see Fig. 1). As well as providing a 15 year, 5 generation extension to optical lithography as used in the manufacture of silicon chips, excimer lasers are used for microfabricating many of the critical features in a wide variety of the electronic and tel...
متن کاملHigh Resolution Powder Blast Micromachining
Powder blasting, or Abrasive Jet Machining (AJM), is a technique in which a particle jet is directed towards a target for mechanical material removal. It is a fast, cheap and accurate directional etch technique for brittle materials like glass, silicon and ceramics. By introducing electroplated copper as a new mask material, the feature size of this process was decreased. It was found that blas...
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ژورنال
عنوان ژورنال: Interdisciplinary Description of Complex Systems
سال: 2014
ISSN: 1334-4676,1334-4684
DOI: 10.7906/indecs.12.1.1